Invented double piezoelectric beam driven diaphragm pump

Application (patent) number.0
Name: Diaphragm-driven diaphragm pump

Public (announcement) day: 2007.01.10

Application (patent) person: Tsinghua University; South Korea Samsung Integrated Technology Research Institute

Address: 100084 Beijing 100084-82 mailbox

Invention (Design) Person: Zhou Zhaoying; Yang Xing; Ye Xiongying; Zhao Huizhen; Luo Xiaobing

Summary

The invention discloses a double piezoelectric beam driven diaphragm air pump which belongs to the technical field of micro fluid pumps in precision machinery. It consists of a cavity, two double piezoelectric beams, a diaphragm with a check valve, and an extraction electrode. The double piezoelectric beam is fixed at one end and the other end is connected to the side of the diaphragm. The bi-piezoelectric beam in the pump chamber is driven by the alternating voltage to drive the diaphragm to vibrate at the resonance point, and the air is flowed in one direction through the action of the one-way valve on the diaphragm to realize gas exchange with the outside. The air pump has many advantages such as simple structure, large output flow, low power consumption, small side size, no electromagnetic noise, few movable parts, high reliability, and the like, and is easy to popularize and apply.

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